Analog Integrated Circuits and Signal Processing · 2017 · 39 citations · 6 references
EngineeringMechanical EngineeringActuatorsInstrumentationSensorsCalibrationCapacitive SensingDevice DesignDisplacement SensorsMems CharacterizationMems DesignAccelerometer CalibrationAccelerometer CharacterizationAccelerometer SensorsAccelerometersAccelerometryCapacitive Acceleration SensingMems Capacitive Accelerometers
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