Mechanical Sensitivity Enhancement of an Area-Changed Capacitive Accelerometer by Optimization of the Device Geometry

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N. Yazdi, Farrokh Ayazi, K. Najafi · Proceedings of the IEEE · 1998 · 1.8K citations

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An Integrated Force-balanced Capacitive Accelerometer For Low-G Applications

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An integrated force-balanced capacitive accelerometer for low-g applications

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Wide dynamic range direct accelerometer

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Micromachined accelerometer with area-changed capacitance

Baoqing Li, Deren Lu, Weiyuan Wang · Mechatronics · 2001 · 32 citations

Engineering, Electrical Engineering, Mechanical Engineering +12