Fabrication and characterization of micromechanical bridges with strain sensors deposited using focused electron beam induced technology

Gas-assisted focused electron beam and ion beam processing and fabrication

Ivo Utke, P. Hoffmann, J. Melngailis · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2008 · 1K citations · Full text

Engineering, Materials Engineering, Materials Science +16

Focused electron beam induced deposition: A perspective

Michael Huth, Fabrizio Porrati, Christian H. Schwalb et al. · Beilstein Journal of Nanotechnology · 2012 · 257 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +15

Purification of platinum and gold structures after electron-beam-induced deposition

Aurélien Botman, J.J.L. Mulders, R Weemaes et al. · Nanotechnology · 2006 · 186 citations

Natural Sciences, Chemistry, Materials Science +9

Review of magnetic nanostructures grown by focused electron beam induced deposition (FEBID)

J. M. De Teresa, Amalio Fernández‐Pacheco, Rosa Córdoba et al. · Journal of Physics D Applied Physics · 2016 · 174 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

Mechanical elasticity of single and double clamped silicon nanobeams fabricated by the vapor-liquid-solid method

Álvaro San Paulo, Jeffrey Bokor, Roger T. Howe et al. · Applied Physics Letters · 2005 · 136 citations

Natural Sciences, Materials Engineering, Materials Science +17