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High-throughput optimization of near-infrared-transparent Mo-doped In2O3 thin films with high conductivity by combined use of atmospheric-pressure mist chemical-vapor deposition and sputtering

Materials ScienceCombined UseHigh ConductivityEngineeringHigh-throughput OptimizationOptical PropertiesOxide ElectronicsSurface ScienceApplied PhysicsGallium OxideThin FilmsChemical Vapor DepositionThin Film Processing