Data Archiving and Networked Services (DANS) · 2012 · 21 citations · 0 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor DevicesSemiconductor MaterialsAluminum OxidesChemical Vapor DepositionDopingMetal OxidesMetalsOxide SemiconductorsAluminum-doped Zinc OxideConductivity In OxidesDoped Metal Oxide NanomaterialsOxide DopingPlasma-assisted Chemical Vapor DepositionPlasma-enhanced Chemical Vapor DepositionResistivityZinc Oxides