Concepedia

Virtual Metrology applied in Run-to-Run Control for a Chemical Mechanical Planarization process

M. Jebri, E. M. El Adel, Guillaume Graton, Mustapha Ouladsine, Jacques Pinaton

Journal of Physics Conference Series · 2017 · 12 citations · 12 references

Open access

Concepts

EngineeringManufacturing EngineeringSystems EngineeringAutomationMetrologyProcess ControlDigital ManufacturingIndustrial MetrologyProcess EngineeringSystem IdentificationControl Loop DesignJust-in-time LearningManufacturingManufacturing MetrologyMetrology For Semiconductor Process ControlPhysical Parameter EstimationRun-to-run ControlSampling Strategies

Abstract

International audience

References

12

A new data-based methodology for nonlinear process modeling

Cheng Cheng, Min‐Sen Chiu · Chemical Engineering Science · 2004 · 281 citations

Engineering, Chemical Engineering, Data Science +14

Virtual metrology and feedback control for semiconductor manufacturing processes using recursive partial least squares

Aftab Aslam Parwaz Khan, James Moyne, Dawn M. Tilbury · Journal of Process Control · 2008 · 137 citations

Engineering, Industrial Engineering, Manufacturing Engineering +17

A Novel Virtual Metrology Scheme for Predicting CVD Thickness in Semiconductor Manufacturing

Min‐Hsiung Hung, Tung-Ho Lin, Fan‐Tien Cheng et al. · IEEE/ASME Transactions on Mechatronics · 2007 · 115 citations

Engineering, Industrial Engineering, Manufacturing Engineering +15

Virtual metrology for run-to-run control in semiconductor manufacturing

Pilsung Kang, Dongil Kim, Hyoungjoo Lee et al. · Expert Systems with Applications · 2010 · 115 citations

Engineering, Manufacturing Engineering, Systems Engineering +16

QSPR study for estimation of acidity constants of some aromatic acids derivatives using multiple linear regression (MLR) analysis

Jahan B. Ghasemi, Saadi Saaidpour, Steven D. Brown · Journal of Molecular Structure THEOCHEM · 2006 · 76 citations

Natural Sciences, Chemistry, Medicinal Chemistry +13