Kinetic Monte Carlo method for the simulation of anisotropic wet etching of quartz - Concepedia

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Kinetic Monte Carlo method for the simulation of anisotropic wet etching of quartz

22

Citations

36

References

2017

Year

Hui Zhang, Yan Xing, Yuan Li, Miguel A. Gosálvez, Xiaoli Qiu

Sensors and Actuators A Physical

Materials ScienceAnisotropic Wet EtchingEngineeringMicrofabricationMechanical EngineeringApplied PhysicsNumerical SimulationSurface ScienceMaterial SimulationPlasma EtchingMultiscale Modeling

References

	Year	Citations

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