Miguel A. Gosálvez

An atomistic introduction to anisotropic etching

Miguel A. Gosálvez, K. Satō, Adam S. Foster et al. · Journal of Micromechanics and Microengineering · 2007 · 115 citations

Engineering, Pattern Transfer, Silicon On Insulator +16

Study of corner compensating structures and fabrication of various shapes of MEMS structures in pure and surfactant added TMAH

Prem Pal, Kazuo Sato, Mitsuhiro Shikida et al. · Sensors and Actuators A Physical · 2008 · 81 citations

Materials Science, Engineering, Microfabrication +7

Improvement in smoothness of anisotropically etched silicon surfaces: Effects of surfactant and TMAH concentrations

Di Cheng, Miguel A. Gosálvez, Tatsuya HORI et al. · Sensors and Actuators A Physical · 2005 · 79 citations

Materials Science, Surface Characterization, Engineering +10

Study of rounded concave and sharp edge convex corners undercutting in CMOS compatible anisotropic etchants

Prem Pal, Kazuo Sato, Miguel A. Gosálvez et al. · Journal of Micromechanics and Microengineering · 2007 · 74 citations

Sharp Convex Corners, Engineering, Cmos Compatibility +18

Orientation- and concentration-dependent surfactant adsorption on silicon in aqueous alkaline solutions: explaining the changes in the etch rate, roughness and undercutting for MEMS applications

Miguel A. Gosálvez, Bin Tang, Prem Pal et al. · Journal of Micromechanics and Microengineering · 2009 · 68 citations

Engineering, Aqueous Alkaline Solutions, Chemistry +19