Planar ring-shaped phononic crystal anchoring boundaries for enhancing the quality factor of Lamb mode resonators

Abstract

We report the use of planar ring-shaped phononic crystals (PnCs) as anchor boundaries of very-high-frequency band piezoelectric-on-silicon Lamb mode resonators for the purpose of enhancing their quality factor (Q). Here, we exploit the acoustic bandgap associated with the PnC anchoring boundaries to reduce acoustic energy leakage out of the micromechanical resonator. The proposed approach provides greater mechanical robustness (by merit of interlocking the cells in a matrix) and the possibility of electrical routing through the PnC cells. We experimentally show enhancements in Q by a factor of three using the proposed approach of hybridizing planar ring-shaped PnCs with micromechanical resonators. The effect of these PnCs on resonator Q is further corroborated by their effects in suppressing transmission when incorporated into a delay line.