Concepedia

Publication | Closed Access

Electron beam generated plasmas: Characteristics and etching of silicon nitride

DOI

33

Citations

52

References

2016

Year

Scott G. Walton, David R. Boris, Sandra C. Hernández, Evgeniya H. Lock, Tz. B. Petrova, G. M. Petrov, Ashish V. Jagtiani, Sebastian Engelmann, Hiroyuki Miyazoe, Eric Joseph
Microelectronic Engineering

References

YearCitations

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