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DIRECT TRANSMISSION ELECTRON MICROSCOPE OBSERVATION OF ELECTROTRANSPORT IN ALUMINUM THIN FILMS
133
Citations
2
References
1967
Year
Materials ScienceAluminium NitrideElectromigration TechniqueEngineeringPhysicsMicrofabricationTransmission Electron MicroscopySurface ScienceApplied PhysicsHole FormationElectron MicroscopeThin FilmsChemical DepositionThin Al StripsElectrochemistryElectrical Insulation
Electrotransport in thin Al strips was directly observed by transmission electron microscopy. As expected, hole formation was seen in regions where the electron flow was in the direction of increasing temperature. Hillocks and whiskers were seen to form where the electron flow was in the direction of decreasing temperature. Ciné films taken of the process show the holes to grow predominantly by a transverse movement of narrow fingers which ultimately coalesce and lead to a catastrophic strip burn-out.
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