Opportunities brought by sequential 3D CoolCube™ integration

Abstract

3D VLSI with a CoolCube™ monolithic integration flow allows vertically stacking several layers of devices with a unique connecting via density above tens of million/mm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> . This results in increased devices density and gains in power and performance thanks to wire-length reduction without the extra cost associated to transistor scaling. In addition to power saving, this true 3D integration opens perspectives in terms of heterogeneous integration. We will review the opportunities brought by CoolCube™ and will present the most advanced technological demonstration of 3D CMOS over CMOS CoolCube™ integration.