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EngineeringMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor DevicesIon ImplantationSemiconductor Device MaterialsSemiconductor HeterostructuresSemiconductor ReliabilityWide-bandgap Semiconductor DevicesGallium Nitride (Gan) MaterialsGallium Nitride Crystal GrowthImplantation-induced Defect FormationIon Implantation Effects
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