Implantation damage formation in a-, c- and m-plane GaN - Concepedia

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Implantation damage formation in a-, c- and m-plane GaN

83

Citations

52

References

2016

Year

K. Lorenz, E. Wendler, A. Redondo‐Cubero, N. Catarino, M. P. Chauvat, Stephan Schwaiger, F. Scholz, E. Alves, P. Ruterana

Acta Materialia

Electrical EngineeringEngineeringApplied PhysicsGan Power DeviceImplantation Damage FormationCategoryiii-v Semiconductor

References

	Year	Citations

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