2002 · 60 citations · 7 references
EngineeringMaterials SciencePhysicsMicroelectronicsSemiconductor DevicesSemiconductor MaterialsCmos Circuit DesignIntegrated Circuit DesignOxide SemiconductorsSemiconductor InterfacesSemiconductor PhysicsThermal Properties Of SemiconductorsBand Gap EnergyEnergy Band GapGate Leakage CurrentGate Oxide LeakageLeakage Current ModelingSubthreshold ConductionThermal StabilityTransport Mechanisms
This paper reports the thermal stability of HfO/sub 2/ with/without Al inclusion (based on XRD and leakage current data), and energy band diagrams for metal/HfO/sub 2//Si structures as well as associated current transport mechanisms (based on gate current characteristics at various temperatures).
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The electronic structure at the atomic scale of ultrathin gate oxides
David A. Muller, T. Sorsch, S. Moccio et al. · Nature · 1999 · 961 citations