Quality factor control for micromechanical resonators

Abstract

The implementation of very high Q microelectromechanical filters, constructed of spring-coupled or parallel resonators, requires strict control over the quality factor of the constituent resonators. This report details electrostatic feedback techniques which allow precise control of the quality factor of a micromechanical resonator device, independent of the ambient operating pressure of the micromechanical system. Theoretical formulas governing Q-control are derived and experimentally verified.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">&gt;</ETX>