Journal of Micromechanics and Microengineering · 2016 · 38 citations · 26 references
EngineeringElectrical EngineeringMechanical EngineeringActuatorsFinite Element MethodsHeat TransferActuator ModelingHeat Transfer AnalysisHeat Transfer ModelingThermal ActuationThermal ActuatorsThermomechanical AnalysisActuator Thermal DynamicsDisplacementElectrothermal ActuationElectrothermal ActuatorsTemperature Distribution AnalysisTemperature Distribution ModelingThermal Actuator DynamicsThermo-mechanical Modelling
International audience
26
Thermal conduction in doped single-crystal silicon films
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Thermo-magnetic metal flexure actuators
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