Miniature Fourier transform spectrometer with a dual closed-loop controlled electrothermal micromirror

Abstract

, or 0.57 nm at 532 nm wavelength. Compared to other presented systems, this microspectrometer will benefit from the closed-loop thermal actuator approach utilizing both the piston servo and tilt control to provide more consistent spectral response, improved spectral resolution and enhanced robustness to disturbances.