Enhanced temperature stability of sensitivity for MEMS gyroscope based on frequency mismatch control

Active frequency tuning for micro resonators by localized thermal stressing effects

Todd Remtema, Liwei Lin · Sensors and Actuators A Physical · 2001 · 128 citations

Electrical Engineering, Engineering, Micro Resonators +9

An Automatically Mode-Matched MEMS Gyroscope With Wide and Tunable Bandwidth

Soner Sonmezoglu, Said Emre Alper · Journal of Microelectromechanical Systems · 2014 · 126 citations · Full text

Sensor Calibration, Tunable Bandwidth, Engineering +13

Automatic Mode Matching in MEMS Vibrating Gyroscopes Using Extremum-Seeking Control

Riccardo Antonello, Roberto Oboe, L. Prandi et al. · IEEE Transactions on Industrial Electronics · 2009 · 100 citations

Single-axis Vibrating Microgyroscope, Engineering, Measurement +24

Characterization of selective polysilicon deposition for mems resonator tuning

Daphne Joachim, Liwei Lin · Journal of Microelectromechanical Systems · 2003 · 63 citations

Materials Science, Mems Devices, Engineering +12

A MEMS Vibratory Gyroscope With Real-Time Mode-Matching and Robust Control for the Sense Mode

Chunhua He, Qiancheng Zhao, Qinwen Huang et al. · IEEE Sensors Journal · 2014 · 49 citations

Sense Mode, Inertial Sensors, Fuzzy Systems +14