Journal of the Korean Physical Society · 2003 · 10 citations · 0 references
EngineeringMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor MaterialsThin FilmsEpitaxial GrowthSemiconductor Device MaterialsSemiconductor SurfacesSemiconductor Thin FilmsSilicon MaterialsThin-film MaterialsEpitaxial Film GrowthEpitaxial Thin-film GrowthMechanical PolishingPolishingSilicon CarbideSilicon Carbide (Sic) MaterialsSurface GrowthThin-film Growth Mechanisms