Homo-epitaxial growth of 3C-SiC(100) thin films on SiC/Si substrate treated by chemical mechanical polishing

Jae Il Roh, K. S. Lee, S. H. Lee, K. S. Nahm, K. C. Kim, K. Y. Lim

Journal of the Korean Physical Society · 2003 · 10 citations · 0 references

Concepts