Transparent Conductive Oxide Nanocrystals Coated with Insulators by Atomic Layer Deposition

Abstract

Thin films comprised of transparent conductive oxide (TCO) nanocrystals are attractive for a number of optoelectronic applications. However, it is often observed that the conductivity of such films is very low when they are in contact with air. It has recently been demonstrated, somewhat surprisingly, that filling in initially insulating films comprised of TCO nanocrystals with another insulator by atomic layer deposition (ALD) dramatically increases the conductivity by many orders of magnitude. This work aims to elucidate the mechanism by which the ALD coating increases conductivity. We examined the effect of removing two adsorbed oxygen species (physisorbed molecular water and chemisorbed hydroxide) on sheet resistance and compared this result to the results with thin films comprised of ZnO nanocrystals coated with Al 2 O 3 and also HfO 2 by ALD. Although both insulating infills decrease the sheet resistance and increase the stability of the films, there is a stark discrepancy between the two. From the in situ measurements, it was found that coating with Al 2 O 3 removes both physisorbed water and chemisorbed hydroxide, resulting in a net reduction of the ZnO nanocrystals. Coating with HfO 2 removes only physisorbed water, which was confirmed by Fourier transform infrared spectroscopy. A similar phenomenon was observed when thin films comprised of Sn-doped In 2 O 3 nanocrystals were coated, suggesting Al 2 O 3 can be used to reduce and stabilize metal oxide nanocrystals in general.