Effects of annealing ambient on oxygen vacancies and phase transition temperature of VO<sub>2</sub> thin films

Huiyan Xu, Yuhong Huang, Siyuan Liu, Kewei Xu, Fei Ma, Paul K. Chu

RSC Advances · 2016 · 84 citations · 41 references

Concepts

Abstract

VO<sub>2</sub> thin films are prepared on Si substrates by direct-current (DC) magnetron sputtering at room temperature and annealed in vacuum at different argon pressures.

References

41