RSC Advances · 2016 · 84 citations · 41 references
Natural SciencesMaterials EngineeringMaterials ScienceCondensed Matter PhysicsSemiconductor MaterialsThin FilmsSemiconductor Thin FilmsThin Film AnnealingThin Film Electrical PropertiesThin-film DepositionThin-film MaterialsAnnealing EffectsAnnealing Temperature EffectsMagnetron SputteringOxygen VacanciesPhase Transition TemperatureThin Oxide FilmsThin Oxide LayersVacuum Annealing
VO<sub>2</sub> thin films are prepared on Si substrates by direct-current (DC) magnetron sputtering at room temperature and annealed in vacuum at different argon pressures.
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