Large-Area MOCVD Growth of Ga2O3 in a Rotating Disc Reactor - Concepedia

Concepedia

Publication | Closed Access

Large-Area MOCVD Growth of Ga2O3 in a Rotating Disc Reactor

48

Citations

27

References

2014

Year

Nick M. Sbrockey, Thomas Salagaj, Elane Coleman, Gary S. Tompa, Youngboo Moon, Myung Sik Kim

Journal of Electronic Materials

Chemical EngineeringRotating Disc Reactor

References

	Year	Citations

Page 1