Metrologia · 2016 · 19 citations · 24 references
Natural SciencesMechanical EngineeringPhysicsMaterials CharacterizationMaterials PhysicsSensorsMechanical CharacterizationMechanical MeasurementMechanical SensorsMechanical TestingNanomechanical PropertiesNanomechanicsCantilever Beam DeflectionCantilever MechanicsDevice CalibrationHigh-precision Force MeasurementMicroscale Force MeasurementSi Derived QuantitiesSoft Force SensorsSpring Constant
The PTB's (Physikalisch-Technische Bundesanstalt, Germany) nanonewton force facility, first presented in work by Nesterov (2007 Meas. Sci. Technol. 18 360–6), Nesterov (2009 Meas. Sci. Technol. 20 084012) and Nesterov et al (2009 Metrologia 46 277–82), has been significantly improved and used to measure the stiffness of a cantilever. The facility is based on a disc pendulum with electrostatic reduction of its deflection and stiffness. In this paper, we will demonstrate that the facility is able to measure horizontal forces in the range below 1 μN with a resolution below 5 pN and an uncertainty below 2.7% for a measured force of 1 nN at a measurement duration of about 20 s. We will demonstrate the possibility of using this facility as a calibration device that can accurately determine spring constants of soft cantilevers (K ≲ 0.1 N m−1) with traceability to the SI units. The method and the results of measuring the spring constant of a soft cantilever (K = 0.125 N m−1) in air, in a medium vacuum, in a high vacuum and in nitrogen are presented. We will show that a relative standard uncertainty of the spring constant calibration of better than 0.3% (measurement in a medium vacuum) and a repeatability of better than 0.04% are achieved.
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