Analytical analysis of mems capacitive pressure sensor with circular diaphragm under dynamic load using differential transformation method (DTM)

Pressure sensitivity in anisotropically etched thin-diaphragm pressure sensors

Samuel Kelly Clark, K.D. Wise · IEEE Transactions on Electron Devices · 1979 · 299 citations

Engineering, Materials Engineering, Mechanical Engineering +17

Touch mode capacitive pressure sensors

Wen H. Ko, Qiang Wang · Sensors and Actuators A Physical · 1999 · 239 citations

Engineering, Materials Science, Mechanical Engineering +11

A batch-fabricated silicon capacitive pressure transducer with low temperature sensitivity

Y. S. Lee, K.D. Wise · IEEE Transactions on Electron Devices · 1982 · 217 citations

Engineering, Electrical Engineering, Mechanical Engineering +17

A monolithic capacitive pressure sensor with pulse-period output

C. Sander, James W. Knutti, J.D. Meindl · IEEE Transactions on Electron Devices · 1980 · 189 citations

Engineering, Mechanical Engineering, Instrumentation +15

High-performance piezoresistive pressure sensors for biomedical applications using very thin structured membranes

Santiago Marco, Josep Samitier, O. Ruiz et al. · Measurement Science and Technology · 1996 · 89 citations

Engineering, Biomedical Engineering, Materials Science +17