Third-dimension information retrieval from a single convergent-beam transmission electron diffraction pattern using an artificial neural network

Abstract

We have reconstructed third-dimension specimen information from convergent-beam electron diffraction (CBED) patterns simulated using the stacked-Bloch-wave method. By reformulating the stacked-Bloch-wave formalism as an artificial neural network and optimizing with resilient back propagation, we demonstrate specimen orientation reconstructions with depth resolutions down to 5 nm. To show our algorithm's ability to analyze realistic data, we also discuss and demonstrate our algorithm reconstructing from noisy data and using a limited number of CBED disks. Applicability of this reconstruction algorithm to other specimen parameters is discussed.