Microsystem Technologies · 2001 · 53 citations · 0 references
EngineeringMaterials ScienceMechanical EngineeringMechanical Behavior Of MaterialsMicroelectromechanical SystemsSensorsForce SensingForce SensorsMechanical SensorsMicroelectromechanical SensorsSoft SensorsTactile SensingForce Sensor MaterialsMicroelectromechanical Force SensorsTactile Force SensorsTactile Sensor DesignTactile Sensors