Statistics
Publications
2
Citations
112
H-Index
2
Active since
2001
Affiliations
T. Kleine-Besten is an author at Technische Universität Braunschweig specializing in microfabrication, engineering, and metrology.
Publications per year
2001–2002
2
2
Recent developments in dimensional metrology for microsystem components
S. Cao, Uwe Brand, T. Kleine-Besten et al. · Microsystem Technologies · 2002 · 59 citations
1–2 of 2