Concepedia

S. Cao

SC

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Publications

1

Citations

59

H-Index

1

Active since

2002

Affiliations

Technische Universität Braunschweig(Current)

S. Cao is an author at Technische Universität Braunschweig specializing in metrology, multiscale modeling, and microfabrication.

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Publications per year

2002–2002

1

Publications

1

Recent developments in dimensional metrology for microsystem components

S. Cao, Uwe Brand, T. Kleine-Besten et al. · Microsystem Technologies · 2002 · 59 citations

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