Concepedia

Handbook of plasma processing technology: Fundamentals, etching, deposition and surface interactions

W Steckelmacher

Vacuum · 1991 · 111 citations · 0 references

Concepts

Natural SciencesMaterials EngineeringMaterials SciencePlasma PhysicsSurface EngineeringSurface ScienceEtching ProcessesHigh-temperature PlasmasPlasma FundamentalsPlasma SourcesPlasma Surface TreatmentPlasma-surface InteractionsCold Plasma ProcessingPlasma DepositionPlasma EtchingPlasma-enhanced DepositionSurface Etching