Control Scheme to Reduce the Effect of Structural Imperfections in a Rate Integrating MEMS Gyroscope

Abstract

In this paper, a control scheme is presented for a rate integrating microelectromechanical system ring gyroscope that reduces the effects of structural imperfections on the precession of an ellipse used to describe the structural vibration of the gyroscope. Modeling is provided that demonstrates the potential increase in gyroscope measurement accuracy on implementation of the control scheme. Furthermore, the description of the gyroscope dynamics used provides an alternative description of the effect of drive mistuning. Finally, experimental results are provided that demonstrate the viability of the proposed control scheme.