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Characteristics of La$_2$O$_3$ Thin Films Deposited Using the ECR Atomic Layer Deposition Method

Woong-Sun Kim, Sang-Kyun Park, Dae-Yong Moon, Byoung-Woo Kang, Heon-Do Kim, Jong‐Wan Park

Journal of the Korean Physical Society · 2009 · 13 citations · 0 references

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