High Deposition Rate Amorphous Silicon Alloy Xerographic Photoreceptor

Luminescence studies of plasma-deposited hydrogenated silicon

R. A. Street, J. C. Knights, D. K. Biegelsen · Physical review. B, Condensed matter · 1978 · 337 citations

Natural Sciences, Materials Science, Physics +17

Growth and defect chemistry of amorphous hydrogenated silicon

B. A. Scott, Jeffrey A. Reimer, P. A. Longeway · Journal of Applied Physics · 1983 · 86 citations

Natural Sciences, Materials Engineering, Materials Science +17

Plasma polymerization and deposition of amorphous hydrogenated silicon from rf and dc silane plasmas

R. C. Ross, J. Jaklik · Journal of Applied Physics · 1984 · 86 citations

Engineering, Materials Engineering, Materials Science +17

Ion and radical reactions in the silane glow discharge deposition of a-Si:H films

G. Turban, Y. Catherine, B. Grolleau · Plasma Chemistry and Plasma Processing · 1982 · 85 citations

Engineering, Materials Engineering, Materials Science +14

Fundamental mechanisms in silane plasma decompositions and amorphous silicon deposition

Johannes Schmitt · Journal of Non-Crystalline Solids · 1983 · 83 citations

Natural Sciences, Materials Engineering, Materials Science +13