Fundamental mechanisms in silane plasma decompositions and amorphous silicon deposition

Scientific foundations of vacuum technique

Vacuum · 1962 · 1.6K citations

Natural Sciences, Physics, Plasma Physics +7

<i>Collision Phenomena in Ionized Gases</i>

E. W. McDaniel, Ernest P. Gray · Physics Today · 1965 · 1.1K citations

Natural Sciences, Physics, Chemical Kinetics +11

Collision phenomena in ionized gases

A L Stewart · Planetary and Space Science · 1965 · 864 citations

Natural Sciences, Physics, Atomic Physics +13

Magnetic Multipole Containment of Large Uniform Collisionless Quiescent Plasmas

R. Limpaecher, K. R. MacKenzie · Review of Scientific Instruments · 1973 · 497 citations

Natural Sciences, Physics, Electromagnetism +8

Positive-ion bombardment of substrates in rf diode glow discharge sputtering

J. W. Coburn, E. Kay · Journal of Applied Physics · 1972 · 421 citations

Natural Sciences, Electrical Engineering, Physics +13