Enhanced electron mobility in epitaxial (Ba,La)SnO3 films on BaSnO3(001) substrates

Abstract

We report the growth of Ba1−xLaxSnO3 (x = 0.00, 0.005, 0.01, 0.02, and 0.04) thin films on the insulating BaSnO3(001) substrate by pulsed laser deposition. The insulating BaSnO3 substrates were grown by the Cu2O-CuO flux, in which the molar fraction of KClO4 was systematically increased to reduce electron carriers and thus induce a doping induced metal-insulator transition, exhibiting a resistivity increase from ∼10−3 to ∼1012 Ω cm at room temperature. We find that all the Ba1−xLaxSnO3 films are epitaxial, showing good in-plane lattice matching with the substrate as confirmed by X-ray reciprocal space mappings and transmission electron microscopy studies. The Ba1−xLaxSnO3 (x = 0.005–0.04) films showed degenerate semiconducting behavior, and the electron mobility at room temperature reached 100 and 85 cm2 V−1 s−1 at doping levels 1.3 × 1020 and 6.8 × 1019 cm−3, respectively. This work demonstrates that thin perovskite stannate films of high quality can be grown on the BaSnO3(001) substrates for potential applications in transparent electronic devices.