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Effects of sputtering and assisting ions on the orientation of titanium nitride films fabricated by ion beam assisted sputtering deposition from metal target

Materials ScienceMaterials EngineeringIon ImplantationEngineeringSurface ScienceApplied PhysicsTitanium Nitride FilmsMetal TargetIon BeamThin FilmsChemical DepositionMicroelectronicsThin Film Processing