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Influence of metallic catalyst and doping level on the metal assisted chemical etching of silicon

Materials ScienceMaterials EngineeringChemical EngineeringChemical EtchingEngineeringWafer Scale ProcessingMicrofabricationSurface ScienceApplied PhysicsSemiconductor Device FabricationMetallic CatalystSilicon On InsulatorMicroelectronicsPlasma EtchingSurface Processing