Thermal expansion coefficients of β-Ga₂O₃single crystals

Abstract

The lattice parameters of monoclinic β-Ga2O3 were determined by powder diffraction in a wide temperature range. The experiments provide a quantitative evaluation of the thermal expansion of the unit cell. It was observed that the expansion of the monoclinic cell is not isotropic. These data are of great technological interest for the deposition of β-Ga2O3 films on foreign substrates as well as for the deposition of different materials (such as GaN) on Ga2O3 substrates.