Publication | Closed Access
Ultrasonic-assisted underwater laser micromachining of silicon
54
Citations
17
References
2016
Year
EngineeringMicromachinesLaser Micro-processingMicrofabricationMechanical EngineeringLaser UltrasoundUltrasoundMicromachiningMicrofluidicsMicromachined Ultrasonic Transducer
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