Journal of Materials Processing Technology · 2016 · 56 citations · 17 references
EngineeringMaterials EngineeringMechanical EngineeringMicroelectromechanical SystemsMicrofabricationUltrasoundLaser Surface ProcessingMicrofabrication ProcessesMicromachiningSilicon PhotonicsSurface MicromachiningUltrasonicsLaser MicromachiningSilicon MicromachiningSilicon Microstructures
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