Publication | Closed Access
Hardening silicon-on-insulator nMOSFETs by multiple-step Si + implantation
10
Citations
21
References
2015
Year
Electrical EngineeringSilicon-on-insulator NmosfetsEngineeringNanoelectronicsApplied PhysicsSemiconductor Device FabricationSilicon On InsulatorMicroelectronics
| Year | Citations | |
|---|---|---|
Page 1
Page 1