Publication | Closed Access
Highly c-axis oriented AlN film grown by unbalanced magnetron reactive sputtering and its electrical properties
34
Citations
31
References
2015
Year
Materials ScienceMaterials EngineeringAln FilmAluminium NitrideEngineeringNanoelectronicsSurface ScienceApplied PhysicsElectrical PropertiesThin Film Processing
| Year | Citations | |
|---|---|---|
Page 1
Page 1