Highly c-axis oriented AlN film grown by unbalanced magnetron reactive sputtering and its electrical properties

Ferroelectric thin films: Review of materials, properties, and applications

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Recent advances in magnetron sputtering

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Development of a novel structure zone model relating to the closed-field unbalanced magnetron sputtering system

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High performance AlScN thin film based surface acoustic wave devices with large electromechanical coupling coefficient

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