Dynamics of polysilicon parallel-plate electrostatic actuators

Microfabricated hinges

Kristofer S. J. Pister, Michael W. Judy, Steve R. Burgett et al. · Sensors and Actuators A Physical · 1992 · 279 citations

Squeeze-film damping in solid-state accelerometers

J. B. Starr · 1990 · 278 citations

Computing, Mechanical Engineering, Finite Element Analysis +13

Analysis of closed-loop control of parallel-plate electrostatic microgrippers

Patrick Chu, S.J. Pister · 2002 · 137 citations

Engineering, Mechanical Engineering, Mechatronics Engineering +17