Parallel-Plate Actuator is a type of electrostatic actuator in micro-electromechanical systems (MEMS) that operates on the principle of variable capacitance, distinguished by its configuration of two conductive plates arranged in parallel and driven by an applied voltage to generate controlled mechanical displacement through electrostatic attraction.
116
Publications
4.8K
Citations
316
Authors
134
Institutions
Publications per year
2017–2026
10
Variants
Parallel-plate Actuator
Publications
116
1–5 of 116
Authors
316
- GZ
6
h-index
- HT
5
h-index
- AM
4
h-index
- LR
4
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- TG
4
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1–5 of 316
Institutions
134
The University of Tokyo
Tokyo, Japan
7 h-index
18 publications
528 citations
Boston University
Boston, United States
6 h-index
13 publications
905 citations
University of California, Berkeley
Berkeley, United States
6 h-index
13 publications
962 citations
Polytechnique Montréal
Montreal, Canada
6 h-index
13 publications
584 citations
Sandia National Laboratories
Albuquerque, United States
5 h-index
5 publications
246 citations
University of California, Los Angeles
Los Angeles, United States
5 h-index
13 publications
973 citations
Stanford University
Stanford, United States
4 h-index
13 publications
882 citations
University of Waterloo
Waterloo, Canada
3 h-index
4 publications
135 citations
1–8 of 134
Venues
- Journal of Microelectromechanical Systems
19 publications · 1.4K citations
17
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- Journal of Micromechanics and Microengineering
JMM · 11 publications · 526 citations
10
h-index
- Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
6 publications · 128 citations
6
h-index
- Applied Physics Letters
3 publications · 92 citations
3
h-index
- Sensors and Actuators A Physical
3 publications · 109 citations
3
h-index
1–5