Concepedia
International Journal of Electrical Machining · 1998 · 29 citations · 0 references
EngineeringManufacturing EngineeringMaterials EngineeringMicroelectromechanical SystemsMicrofabricationMachiningMicrofabrication MaterialsMicrofabrication ProcessesMicromachiningSurface MicromachiningHigh-aspect-ratio MicromachiningMicro-toolingMicroscale Fabrication