Double-Structured Laminated Heads with Substrate Bias-Sputtered FeTaN Films.

Abstract

Substrate bias-Sputtered FeTaN/SiO2 multilayer films with double structure were prepared with electrically insulated thick FeTaN layers, each of which layer consisted of thin FeTaN layers where the anisotropy direction of each FeTaN layer was different from that of the adjacent FeTaN layer. Such films, hereafter called “Double-structured substrate Biassputtered Multilayer (DSBM) films” , were developed for their potential use in magnetic heads. Doublestructured laminated (DSL) heads composed of the DSBM films sandwiched with ceramic substrates have been developed. These heads, which show as good recording characteristics as the heads composed of conventional laminated FeTaN films (CL heads) when used with high-coercivity tape, exhibit superior reproduction characteristics at high frequencies to that of the CL heads.