Concepedia

FTIR and electrical characterization of a-Si:H layers deposited by PECVD at different boron ratios

Abdú Orduña-Díaz, C. G. Treviño-Palacios, Marlon Rojas‐López, R. Delgado‐Macuil, V. L. Gayou, Alfonso Torres

Materials Science and Engineering B · 2010 · 14 citations · 9 references

DOI

Concepts

References

9

Infrared and Raman spectra of the silicon-hydrogen bonds in amorphous silicon prepared by glow discharge and sputtering

M. H. Brodsky, M. Cardona, J. J. Cuomo · Physical review. B, Solid state · 1977 · 1.6K citations

, , +17

Thin-film poly-Si solar cells on glass substrate fabricated at low temperature

Kenji Yamamoto, Masashi Yoshimi, Y. Tawada et al. · Applied Physics A · 1999 · 189 citations

, , +16

Raman spectroscopy of B-doped microcrystalline silicon films

Rosari Saleh, N. H. Nickel · Thin Solid Films · 2003 · 87 citations

, , +13

Fundamental mechanisms in silane plasma decompositions and amorphous silicon deposition

Johannes Schmitt · Journal of Non-Crystalline Solids · 1983 · 83 citations

, , +13

Plasma enhanced chemical vapour deposition of hydrogenated amorphous silicon at atmospheric pressure

M. Moravej, S E Babayan, G R Nowling et al. · Plasma Sources Science and Technology · 2003 · 72 citations

, , +17