Highly Optimized Nanocrystal-Based Split Gate Flash for High Performance and Low Power Microcontroller Applications

Jane Yater, Sung Taeg Kang, B. Min, Jiayun Shen, G. Chindalore, K. Loiko, B. Winstead, Samuel Williams, H. Gasquet, M. Suhail,

2011 · 12 citations · 1 references

Concepts

Abstract

We show a 90nm nanocrystal-based split gate embedded flash memory that is able to meet the speed, endurance and reliability requirements for 32-bit microcontroller products. A 3.4V operating window is achievable and the process is robust and repeatable across many lots. Erase after 10k cycles can be achieved in 5ms, long-term data retention of cycled arrays is not susceptible to SILC-induced charge loss mechanisms, and program disturb can meet the needs of flash and EEPROM.

References

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