Prediction of cutting forces in the micro-machining of silicon using a “hybrid molecular dynamic-finite element analysis” force model

Computer simulation of local order in condensed phases of silicon

Frank H. Stillinger, Thomas A. Weber · Physical review. B, Condensed matter · 1985 · 5.3K citations

Natural Sciences, Materials Science, Physics +16

Modeling solid-state chemistry: Interatomic potentials for multicomponent systems

J. Tersoff · Physical review. B, Condensed matter · 1989 · 4.1K citations

Natural Sciences, Chemistry, Materials Science +17

New empirical approach for the structure and energy of covalent systems

J. Tersoff · Physical review. B, Condensed matter · 1988 · 3.5K citations

Natural Sciences, Chemistry, Physics +17

Specimen size effect on tensile strength of surface-micromachined polycrystalline silicon thin films

Toshiyuki Tsuchiya, Osamu Tabata, Jiro Sakata et al. · Journal of Microelectromechanical Systems · 1998 · 389 citations

Natural Sciences, Materials Engineering, Materials Science +17

Fracture testing of bulk silicon microcantilever beams subjected to a side load

Christopher J. Wilson, Patricia Beck · Journal of Microelectromechanical Systems · 1996 · 134 citations

Engineering, Materials Engineering, Mechanical Engineering +17