Publication | Closed Access
Generation of submicrometer structures by photolithography using arrays of spherical microlenses
36
Citations
15
References
2003
Year
EngineeringElectron-beam LithographyBeam LithographyMicrofabricationMicroscopyApplied PhysicsSubmicrometer StructuresSpherical MicrolensesBiomedical EngineeringMicro-optical ComponentMicrofluidicsOptical Sensors3D PrintingNanolithography Method
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