An approach to the coupling effect between torsion and bending for electrostatic torsional micromirrors - Concepedia

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An approach to the coupling effect between torsion and bending for electrostatic torsional micromirrors

92

Citations

26

References

2004

Year

Jianming Huang, A. Q. Liu, Zhiliang Deng, Q.X. Zhang, J. Ahn, Anand Asundi

Sensors and Actuators A Physical

EngineeringMicromechanicsMicrofabricationMechanicsMechanical EngineeringApplied PhysicsElectrostatic Torsional MicromirrorsMicro-optical ComponentMicro-electromechanical System

References

	Year	Citations

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