Concepedia

Fabrication of planar silicon transistors without photoresist

T.W. O'Keeffe, R.M. Handy

Solid-State Electronics · 1968 · 53 citations · 2 references

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Concepts

References

Concepts

Wafer Scale ProcessingEngineeringMicrofabricationPlanar Silicon TransistorsApplied PhysicsSemiconductor Device FabricationTechnologyMicroelectronicsOptoelectronicsSilicon On Insulator

References

2

The electron beam fabrication of small geometry transistors

Marilynn Larkin, R. K. Matta · Solid-State Electronics · 1967 · 16 citations

Electrical Engineering, Engineering, Electron-beam Lithography +4

Effects of Radiation on Semiconductors

J. H. Crawford · Nuclear Science and Engineering · 1966 · 13 citations

Semiconductors, Semiconductor Technology, Engineering +11